Journal
OPTICS LETTERS
Volume 37, Issue 10, Pages 1682-1684Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.37.001682
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- Natural Sciences and Engineering Research Council of Canada
- Canadian Institute for Photonic Innovations
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Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 mu m periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps. (C) 2012 Optical Society of America
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