Journal
OPTICS LETTERS
Volume 36, Issue 14, Pages 2668-2670Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.36.002668
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Funding
- National Science Foundation (NSF) [ECCS-0642603, ECCS-0723055, ECCS-0925399]
- Air Force Office of Scientific Research (USAFOSR)
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Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. (C) 2011 Optical Society of America
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