4.6 Article

Soft x-ray microscope constructed with a PMMA phase-reversal zone plate

Journal

OPTICS LETTERS
Volume 34, Issue 3, Pages 235-237

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OL.34.000235

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Funding

  1. Ministry of Education, Science, and Technology of Korea through the Korea Science and Engineering Foundation (KOSEF)
  2. Ministry of Education, Science & Technology (MoST), Republic of Korea [KIOST2] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
  3. National Research Foundation of Korea [2008-2006612] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 113 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm. (C) 2009 Optical Society of America

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