Design of an ultra-compact electro-absorption modulator comprised of a deposited TiN/HfO_2/ITO/Cu stack for CMOS backend integration
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Title
Design of an ultra-compact electro-absorption modulator comprised of a deposited TiN/HfO_2/ITO/Cu stack for CMOS backend integration
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 22, Issue 15, Pages 17930
Publisher
The Optical Society
Online
2014-07-17
DOI
10.1364/oe.22.017930
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