Journal
OPTICS EXPRESS
Volume 22, Issue 25, Pages 31529-31544Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.22.031529
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- German Research Foundation (DFG)
- Albert Ludwigs University Freiburg
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Based on an advanced silicon optical bench technology with integrated MOEMS (Micro-Opto-Electro-Mechanical-System) components, a piezo-driven fiber scanner for confocal microscopy has been developed. This highly-miniaturized technology allows integration into an endoscope with a total outer probe diameter of 2.5 mm. The system features a hydraulically-driven varifocal lens providing axial confocal scanning without any translational movement of components. The demonstrated resolutions are 1.7 mu m laterally and 19 mu m axially. (C) 2014 Optical Society of America
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