4.6 Article

Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects

Journal

OPTICS EXPRESS
Volume 20, Issue 11, Pages 12035-12039

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.20.012035

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Funding

  1. Luxtera team
  2. DARPA [HR0011-08-090001]

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We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects. (c) 2012 Optical Society of America

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