Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

Title
Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 20, Issue 25, Pages 27661
Publisher
The Optical Society
Online
2012-11-30
DOI
10.1364/oe.20.027661

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