Demonstration of submicron square-like silicon waveguide using optimized LOCOS process

Published 2010 View Full Article

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Title
Demonstration of submicron square-like silicon waveguide using optimized LOCOS process
Authors
Keywords
-
Journal
OPTICS EXPRESS
Volume 18, Issue 18, Pages 18592
Publisher
The Optical Society
Online
2010-08-17
DOI
10.1364/oe.18.018592

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