Plasma power controlled deposition of SiO_x with manipulated Si Quantum Dot size for photoluminescent wavelength tailoring

Title
Plasma power controlled deposition of SiO_x with manipulated Si Quantum Dot size for photoluminescent wavelength tailoring
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 18, Issue 5, Pages 4449
Publisher
The Optical Society
Online
2010-02-20
DOI
10.1364/oe.18.004449

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