Single-anchor support and supercritical CO_2 drying enable high-precision microfabrication of three-dimensional structures

Published 2009 View Full Article

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Title
Single-anchor support and supercritical CO_2 drying enable high-precision microfabrication of three-dimensional structures
Authors
Keywords
-
Journal
OPTICS EXPRESS
Volume 17, Issue 23, Pages 20945
Publisher
The Optical Society
Online
2009-11-03
DOI
10.1364/oe.17.020945

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