Metrology of non-thermal capacitively coupled N2–Ar mixture plasma

Title
Metrology of non-thermal capacitively coupled N2–Ar mixture plasma
Authors
Keywords
-
Journal
OPTICS COMMUNICATIONS
Volume 296, Issue -, Pages 72-78
Publisher
Elsevier BV
Online
2013-02-10
DOI
10.1016/j.optcom.2013.01.004

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