Deformation analysis of MEMS structures by modified digital moiré methods

Published 2010 View Full Article

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Title
Deformation analysis of MEMS structures by modified digital moiré methods
Authors
Keywords
-
Journal
OPTICS AND LASERS IN ENGINEERING
Volume 48, Issue 11, Pages 1067-1075
Publisher
Elsevier BV
Online
2010-01-19
DOI
10.1016/j.optlaseng.2009.12.007

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