Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography

Published 2012 View Full Article

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Title
Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography
Authors
Keywords
-
Journal
OPTICS AND LASER TECHNOLOGY
Volume 44, Issue 6, Pages 1649-1653
Publisher
Elsevier BV
Online
2012-02-17
DOI
10.1016/j.optlastec.2011.11.051

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