Micro-machining of silicon wafer in air and under water

Published 2010 View Full Article

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Title
Micro-machining of silicon wafer in air and under water
Authors
Keywords
-
Journal
OPTICS AND LASER TECHNOLOGY
Volume 43, Issue 1, Pages 62-71
Publisher
Elsevier BV
Online
2010-06-03
DOI
10.1016/j.optlastec.2010.05.005

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