Article
Optics
Lin Wang, Debao Fang, Haibo Jin, Jingbo Li
Summary: In this study, we employed the rigorous coupled wave analysis (RCWA) and combined boundary conditions method (CBCM) to analyze the optical properties of two-dimensional periodic metamaterial gratings with arbitrary shapes in the microwave domain. The adaptive spatial resolution (ASR) function was introduced to enhance convergence, particularly for crossed metamaterial gratings. The numerical results demonstrated that the RCWA with CBCM achieved correct convergence and could differentiate the contribution of the grating lobes to the total transmission and reflection. Moreover, the ASR technique significantly improved the convergence speed of crossed gratings, providing a more effective computational tool for the design of metamaterial gratings in the microwave domain.
Article
Optics
Lin Wang, Debao Fang, Haibo Jin, Jingbo Li
Summary: In this study, the reliability of standard RCWA for multilayer gratings with metal-dielectric structures was enhanced using the 2D modal solution of rigorous coupled wave analysis with adaptive spatial resolution. The conversion relation between the modal solutions in the Cartesian system and the transformed system was established for the first time. Numerical results showed that the proposed method achieved good convergence even for metal patches in the microwave band and was perfectly suitable for multi-layer structure calculation.
Article
Optics
Tobias Lange, Annika Voell, Michael Berens, Jochen Stollenwerk, Peter Loosen, Carlo Holly
Summary: This paper introduces a new model that incorporates wave-optical effects into Monte Carlo path rendering concepts, enabling the rendering of arbitrarily structured periodic optical components for complex scenes for design, verification, and testing purposes. The method's performance is demonstrated through comparisons of rendering results with corresponding photographs.
Article
Optics
Lin Wang, Debao Fang, Haibo Jin, Jingbo Li
Summary: This paper proposes a novel Global NV-ETM RCWA method to accelerate the optimization of periodic stepped radar absorbing structures. The method improves the convergence rate for dielectric and magnetic metasurfaces by utilizing the NV field and ETM approach. The optimization results demonstrate a significant increase in computational efficiency, providing a powerful tool for designing metasurface absorbers with desired functionalities.
Article
Engineering, Electrical & Electronic
Timothy J. Palinski, Brian E. Vyhnalek, Gary W. Hunter, Amogha Tadimety, John X. J. Zhang
Summary: This study demonstrates a platform for the active switching of hybrid plasmonic-photonic Fano resonances, achieving on/off switching of narrow Fano resonance transparency windows with high contrast and tunability across a wide spectral range by modulating refractive index. The structure includes gold nanogratings sandwiched between two dielectric thin films, and controlling the interaction of substrate and superstrate modes through refractive index tuning enables both spectral and spatial selectivity.
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
(2021)
Article
Mathematics, Applied
Benjamin J. Civiletti, Akhlesh Lakhtakia, Peter B. Monk
Summary: The study investigates the convergence properties of the two-dimensional Rigorous Coupled Wave Approach (RCWA) for p-polarized monochromatic incident light. It shows that the method converges with increasing number of retained Fourier modes and finer approximations of the relative permittivity.
JOURNAL OF COMPUTATIONAL AND APPLIED MATHEMATICS
(2021)
Article
Optics
Krzysztof Patorski, Maria Cywinska, Piotr Zdankowski, Maciej Trusiak
Summary: This study proposes a design of 2D gratings with 2D sinusoidal-like transmittance for spectral analysis in a wide wavelength range by using the concept of multiplicative superimposition of two 1D binary amplitude gratings. The obtained trapezoidal transmittance function allows easy control of the distance between main diffraction orders in two perpendicular directions. Calculation and comparison of diffraction efficiencies and parameters with solutions reported in the literature validate the design considerations.
OPTICS AND LASERS IN ENGINEERING
(2021)
Article
Engineering, Electrical & Electronic
Yong Zhao, Yuechun Shi, Pan Dai, Shengping Liu, Lijun Hao, Yuxin Ma, Xiangfei Chen
Summary: This paper proposes, analyzes, and demonstrates a side-coupled Fabry-Perot resonator filter consisting of two dissimilar waveguides with pi phase-shifted Bragg grating. The resonance circuit is formed by mode conversion between the TE0 modes of the two waveguides, allowing for a wide free spectral range or a single strong resonance at the central wavelength of mode conversion. Compared to conventional F-P resonators, the proposed resonator can only couple one transverse mode to the bus waveguide, resulting in no intrinsic reflection and low resonance loss.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2022)
Article
Mathematics, Applied
Dominik Engl, Carolin Kreisbeck
Summary: In this study, a hierarchy of one-dimensional rod theories is derived using variational convergence from three-dimensional models in nonlinear elasticity subject to local volume-preservation. The densities of the resulting Gamma-limits are determined by minimization problems with a trace constraint arising from the linearization of the determinant condition of incompressibility. Lower bounds proofs rely on suitable constraint regularization, while upper bounds require a careful construction of locally volume-preserving recovery sequences.
ASYMPTOTIC ANALYSIS
(2021)
Article
Materials Science, Multidisciplinary
Kwangjin Kim, Yongjun Lim, Heeju Son, Seung Jae Hong, Chang-Won Shin, Dongjae Baek, Hyeon Ho Kim, Nam Kim, Joona Bang, Seungwoo Lee
Summary: This study systematically develops the key characteristics and structural requirements of optical Fourier volumes (OFVs) using analytical and numerical calculations. The dynamic range and thickness of volume gratings required for OFVs are defined, and holographic photopolymers and photoaddressable polymers are validated as easy-to-craft mediums for OFVs.
ADVANCED OPTICAL MATERIALS
(2022)
Article
Optics
S. Soman, S. F. Pereira, O. El Gawhary
Summary: This paper reports the first results on retrieving the geometric parameters of a diffraction grating by analyzing the corresponding complex-valued Helmholtz Natural Modes (HNM) spectra containing both the azimuthal and radial indices. The results show the sensitivity of the HNMs to several grating parameters, which is of great importance.
Article
Engineering, Multidisciplinary
Dan Wu, Lei Qian, Pengfei Zhu
Summary: This paper proposed an image distortion elimination method based on optimized windowed Fourier transform processing. By conducting simulation testing, the optimal parameters were determined and used to successfully calibrate the image distortion of an optical microscope under various magnifications.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2021)
Article
Nanoscience & Nanotechnology
Anqi Yu, Xiaolin Zhao, Sheng Ni, Rui Dai, Jinshui Miao, Xuguang Guo
Summary: In this study, a 3-layer cross copper grating structure was simulated using RCWA and FEM, showing reflection dips in the infrared frequencies due to bonding localized surface plasmon mode excited in the 2nd Cu gratings. Another anti-bonding mode can be observed in visible light frequencies. The plasmonic resonance peaks in the reflection spectrum are highly sensitive to the structural parameters and can be useful for Optical Critical Dimension (OCD) metrology.
PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS
(2021)
Article
Optics
Josu Amorebieta, Angel Ortega-Gomez, Ruben Fernandez, Enrique Antonio-Lopez, Axel Schulzgen, Joseba Zubia, Rodrigo Amezcua-Correa, Gaizka Durana, Joel Villatoro
Summary: This paper presents a temperature sensor based on multicore fiber that operates in a wide thermal range and is robustly packaged for harsh environments. The sensor shows higher sensitivity in reflection mode and is packaged with inner ceramic and outer metallic tubes for protection. The device can accurately measure temperature in demanding industrial applications and can be easily fabricated and interrogated.
OPTICS AND LASER TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
Ricardo E. da Silva, Egor Manuylovich, Namita Sahoo, Martin Becker, Manfred Rothhardt, Hartmut Bartelt, David J. Webb
Summary: This study demonstrates acousto-optic modulation of a fiber Bragg grating in a birefringent suspended core fiber at frequencies up to 5.2 MHz. The reflectivity of the orthogonal polarization modes can be electrically switched at acoustic resonances lower than 820 kHz, with a maximum modulation depth of 51%. The wavelength peak of the polarization modes can be dynamically shifted by tuning the driven electrical signal frequency. A new side-coupled based acousto-optic device is demonstrated, showing potential for ultracompact, fast, and efficient all-fiber integrated devices.
IEEE PHOTONICS TECHNOLOGY LETTERS
(2021)
Article
Optics
Honggang Gu, Hao Jiang, Xiuguo Chen, Chuanwei Zhang, Shiyuan Liu
Summary: The article introduces the polarization measurement system and its applications in physics and material. The general theoretical aspects related to linear polarization systems are discussed from the perspective of matrix algebra. A new framework of superachromatic polarization modulator is proposed, which provides stable and complete polarization modulation over an ultra-wide spectral range.
Review
Engineering, Manufacturing
Jinlong Zhu, Jiamin Liu, Tianlai Xu, Shuai Yuan, Zexu Zhang, Hao Jiang, Honggang Gu, Renjie Zhou, Shiyuan Liu
Summary: The article delves into the emerging trends in defect detection methods in the field of integrated circuits, focusing on defect detectability evaluation, diverse optical inspection systems, and post-processing algorithms. This is of great importance to newcomers in the field as well as those seeking to use it in interdisciplinary work.
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING
(2022)
Article
Optics
Chao Chen, Xiuguo Chen, Sheng Sheng, Zhongwen Xia, Jiacheng Shi, Wen Qiao, Shiyuan Liu
Summary: In this study, a home-made imaging Mueller matrix ellipsometer (IMME) was proposed to monitor the sidewall tilting of pixelated nanogratings. Through the combination of Mueller matrix elements, the tilting angle can be quickly and qualitatively identified for on-line quality monitoring of the device. By inversely calculating the Mueller matrix, the value of the tilting can be accurately and quantitatively obtained to meet the demands of the device design. It is expected that this method can provide guidance for the identification and detection of tilting in 3D display elements based on pixelated gratings.
Article
Materials Science, Multidisciplinary
Chunfu Guo, Yating Shi, Huaxi Wu, Yabo Xiang, Weiqi Li, Chuanwei Zhang, Shiyuan Liu
Summary: Optical scatterometry is widely used for nanostructure metrology in integrated circuit. This paper proposes a combination of library search and Levenberg-Marquardt algorithm to solve the problem. Simulations and experiments demonstrate that the proposed method is accurate and significantly faster than previous methods.
Article
Chemistry, Multidisciplinary
Honggang Gu, Zhengfeng Guo, Liusheng Huang, Mingsheng Fang, Shiyuan Liu
Summary: In this study, a quantitative strategy is proposed to systematically identify the critical point optical transitions of 2D semiconductors by combining spectroscopic ellipsometry and DFT calculations. Optical functions and critical points are determined by spectroscopic ellipsometry and connected to DFT band structure and projected density of states. The combination of spectroscopic ellipsometry and DFT provides a powerful tool to investigate the critical point optical transitions.
Article
Chemistry, Multidisciplinary
Zhengfeng Guo, Honggang Gu, Yali Yu, Zhongming Wei, Shiyuan Liu
Summary: Optical anisotropy in SnSe is utilized to design broadband and incident-angle-modulation near-infrared polarizers, with high modulation efficiency and no energy consumption. The broadband polarizer has a bandwidth of 324 nm and an average extinction ratio above 23 dB, while the incident-angle-modulation polarizer dynamically and reversibly modulates its working wavelength with a maximum extinction ratio of 71 dB. The proposed design opens up possibilities for mass-production and integration of polarizing optical components based on low-symmetry materials.
Article
Optics
Jinsong Zhang, Jiamin Liu, Jinlong Zhu, Hao Jiang, Shiyuan Liu
Summary: In this paper, an angle-resolved scatterometer capable of detecting multi-order diffracted light in a single measurement is proposed. An in-situ calibration method for the objective lens's polarization effects is also introduced. By considering the polarization effect of the objective lens, significant improvements in accuracy and repeatability precision can be achieved in the metrology of film thickness and grating topography parameters.
Article
Optics
Yaobin Feng, Zhiyang Song, Jiaman Liu, Zhiqin LI, Feng Yang, Hao Jiang, Shiyuan Liu
Summary: This paper proposes a method to evaluate the pattern coverage before obtaining any metrology data and constructs evaluation metrics. Experimental results show a positive correlation between these metrics and lithographic model accuracy. This method can improve the efficiency of OPC model building and is beneficial to the development process of the whole OPC recipe.
Article
Optics
Xiuguo Chen, Jing Hu, Wenlong Chen, Shilong Yang, Yifu Wang, Shiyuan Liu
Summary: This letter proposes a multi-spectral diffraction-based overlay (DBO) metrology method that utilizes the linear relation between overlay errors and combinations of Mueller matrix elements. The proposed approach enables snapshot and direct measurement of overlay errors over a wide spectral range without the need for rotating or active polarization components.
Article
Engineering, Multidisciplinary
Tianjuan Yang, Xiuguo Chen, Shuo Liu, Jiahao Zhang, Shiyuan Liu
Summary: This study proposes a measurement configuration optimization (MCO) method for optical scatterometry, which combines error propagation theory and condition-number-based error estimation technique to select an optimal or suboptimal combination of measurement conditions for higher measurement accuracy. The method is demonstrated on a multi-wavelength Mueller matrix scatterometry and shows good agreement in fitting results. This method provides an alternate solution to evaluate the MCO problem in optical scatterometry and other measurement scenarios.
MEASUREMENT SCIENCE AND TECHNOLOGY
(2023)
Article
Optics
Chuangchuang Chen, Jiamin Liu, Jinlong Zhu, Honggang Gu, Shiyuan Liu
Summary: Reflection ptychography is a lens-free computational imaging technology that captures distorted diffracted patterns using a coherent beam illuminated to a specimen inclined to the optical axis. The distortion caused by the non-coplanar scattering geometry disrupts the standard ptychographic reconstruction algorithms. We propose and analyze an axial distance calibration approach to improve the reconstructed resolution in reflection ptychography.
OPTICS AND LASERS IN ENGINEERING
(2023)
Article
Optics
Li Liu, Wenjie Li, Lei Zhong, Honggang Gu, Shiyuan Liu
Summary: This paper proposes an adaptive noise-blind-separation (aNBS) algorithm to deal with mixed noises of different types in ptychography. The algorithm introduces virtual probes of different wavelengths to capture noise energies and adaptively separates the mixed noises in ptychography. The proposed algorithm can separate coherent diffraction signals and noises without additional constraints or assumptions.
OPTICS AND LASERS IN ENGINEERING
(2023)
Article
Optics
Pinxuan He, Jiamin Liu, Honggang Gu, Jinlong Zhu, Hao Jiang, Shiyuan Liu
Summary: A method based on the modified Born series (MBS) is introduced for efficiently and accurately calculating the near field of extreme ultraviolet (EUV) masks with complex patterns. The MBS method is much faster than the finite-difference time-domain method while maintaining comparable accuracy.
Article
Optics
Zhou Jiang, Song Zhang, Hao Jiang, Shiyuan Liu
Summary: This paper proposes a calibration method to compensate for the field-of-view effect of waveplates installed in instruments, and verifies the effectiveness of the method through experiments. The results show that the proposed method significantly improves the precision and accuracy of film thickness measurement, reduces the assembly difficulty of optical systems, and improves their accuracy and stability.
Article
Optics
Jiamin Liu, Wenqi Gong, Lei Li, Song Zhang, Jinlong Zhu, Rong Chen, Hao Jiang, Shiyuan Liu
Summary: This paper presents an in-situ characterization method based on Mueller-matrix ellipsometry for investigating the longitudinal MO Kerr effects occurring in subwavelength thick ferromagnetic films. The proposed method allows reliable capture of the weak MO Kerr response signal of the ferromagnetic films with high repeatability precision better than 0.0002.
OPTICS AND LASERS IN ENGINEERING
(2023)