Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 333, Issue -, Pages 58-63Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2014.04.011
Keywords
Heavy ion irradiation; Polyethylene terephthalate; Ion track membrane; Pore shape; Multi-step etching
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Funding
- West Light project and technological cooperation project for Wuhan Province (the Chinese Academy of Sciences), National Natural Science Foundation of China [11205215, 11275237]
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A method for the fabrication of different pore shapes in polyethylene terephthalate (PET)-based track etched membranes (TEMs) is reported. A multi-step etching technique involving etchant variation and track annealing was applied to fabricate different pore shapes in PET membranes. PET foils of 12-mu m thickness were irradiated with Bi ions (kinetic energy 9.5 MeV/u, fluence 10(6) ions/cm(2)) at the Heavy Ion Research Facility (HIRFL, Lanzhou). The cross-sections of fundamental pore shapes (cylinder, cone, and double cone) were analyzed. Funnel-shaped and pencil-shaped pores were obtained using a two-step etching process. Track annealing was carried out in air at 180 degrees C for 120 min. After track annealing, the selectivity of the etching process decreased, which resulted in isotropic etching in subsequent etching steps. Rounded cylinder and rounded cone shapes were obtained by introducing a track-annealing step in the etching process. Cup and spherical funnel-shaped pores were fabricated using a three- and four-step etching process, respectively. The described multi-step etching technique provides a controllable method to fabricate new pore shapes in TEMs. Introduction of a variety of pore shapes may improve the separation properties of TEMs and enrich the series of TEM products. (C) 2014 Elsevier B.V. All rights reserved.
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