Depth of origin of sputtered atoms: Exploring the dependence on relevant target properties to identify the correlation with low-energy ranges

Published 2012 View Full Article

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Title
Depth of origin of sputtered atoms: Exploring the dependence on relevant target properties to identify the correlation with low-energy ranges
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 281, Issue -, Pages 37-44
Publisher
Elsevier BV
Online
2012-04-07
DOI
10.1016/j.nimb.2012.03.028

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