Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 266, Issue 6, Pages 998-1011Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2008.01.059
Keywords
electron-scattering; Rutherford backscattering; surface analysis
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Ion beam analysis is the method of choice for studying the composition of layers with a thickness exceeding several tens of angstrom. Recently it has become clear that elastic scattering of keV electrons can be used to determine the surface composition of relatively thick layers (up to 1000 angstrom) in a way very similar to ion scattering experiments. These electron-scattering experiments share much of the underlying physics of electron spectroscopy and ion scattering. In this paper we systematically describe the similarities and differences between the electron-scattering experiments and the ion-beam experiments and illustrate this description with relevant electron-scattering examples. (C) 2008 Elsevier B.V. All rights reserved.
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