Fabrication of microstructured optical elements for visible light by means of LIGA-technology

Published 2009 View Full Article

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Title
Fabrication of microstructured optical elements for visible light by means of LIGA-technology
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 603, Issue 1-2, Pages 157-159
Publisher
Elsevier BV
Online
2009-01-04
DOI
10.1016/j.nima.2008.12.147

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