The influence of substrate temperature on the optical and micro structural properties of cerium oxide thin films deposited by RF sputtering

Title
The influence of substrate temperature on the optical and micro structural properties of cerium oxide thin films deposited by RF sputtering
Authors
Keywords
Thin film, Substrate temperature, CeO, 2, RF sputtering, XRD, XPS
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 85, Issue -, Pages 321-330
Publisher
Elsevier BV
Online
2015-06-06
DOI
10.1016/j.spmi.2015.05.041

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