Effects of thickness variation on properties of ZnO:Al thin films grown by RF magnetron sputtering deposition

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Title
Effects of thickness variation on properties of ZnO:Al thin films grown by RF magnetron sputtering deposition
Authors
Keywords
Thin film, ZnO:Al, Magnetron sputtering, Thickness variation, Properties
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 79, Issue -, Pages 148-155
Publisher
Elsevier BV
Online
2014-12-10
DOI
10.1016/j.spmi.2014.12.001

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