Fabrication and characterization of Al:ZnO based MSM ultraviolet photodetectors

Published 2015 View Full Article

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Title
Fabrication and characterization of Al:ZnO based MSM ultraviolet photodetectors
Authors
Keywords
Al doped zinc oxide, RF sputtering, UV detector, Metal–semiconductor–metal, Interdigited palladium electrodes
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 86, Issue -, Pages 412-417
Publisher
Elsevier BV
Online
2015-08-19
DOI
10.1016/j.spmi.2015.08.019

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