Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing

Published 2013 View Full Article

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Title
Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing
Authors
Keywords
-
Journal
NEUROCOMPUTING
Volume 131, Issue -, Pages 427-439
Publisher
Elsevier BV
Online
2013-10-24
DOI
10.1016/j.neucom.2013.10.001

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