Large area p-type PERL cells featuring local p+ BSF formed by laser processing of ALD Al2O3 layers

Published 2015 View Full Article

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Title
Large area p-type PERL cells featuring local p+ BSF formed by laser processing of ALD Al2O3 layers
Authors
Keywords
Aluminum oxide, Spatial ALD, Laser doping, PERL, Cu-plating
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 138, Issue -, Pages 72-79
Publisher
Elsevier BV
Online
2015-03-19
DOI
10.1016/j.solmat.2015.02.034

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