Parameter optimization of etching process for a LGP stamper

Authors

Keywords

Light guide plate, Stamper, Etching process, Taguchi orthogonal array, Back-propagation neural networks, Genetic algorithms, Particle swarm optimization

Journal

NEURAL COMPUTING & APPLICATIONS

Volume 23, Issue 6, Pages 1539-1550

Publisher

Springer Nature

Online

2012-07-31

DOI

10.1007/s00521-012-1103-2

References

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