Bottom-up nanofabrication through catalyzed vapor phase HF etching of SiO2

Title
Bottom-up nanofabrication through catalyzed vapor phase HF etching of SiO2
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 26, Issue 1, Pages 015301
Publisher
IOP Publishing
Online
2014-12-04
DOI
10.1088/0957-4484/26/1/015301

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