Experimental study of plane electrode thickness scaling for 3D vertical resistive random access memory

Title
Experimental study of plane electrode thickness scaling for 3D vertical resistive random access memory
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 46, Pages 465201
Publisher
IOP Publishing
Online
2013-10-23
DOI
10.1088/0957-4484/24/46/465201

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