Mold cleaning with polydimethylsiloxane for nanoimprint lithography

Published 2013 View Full Article

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Title
Mold cleaning with polydimethylsiloxane for nanoimprint lithography
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 24, Issue 32, Pages 325301
Publisher
IOP Publishing
Online
2013-07-17
DOI
10.1088/0957-4484/24/32/325301

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