Monte Carlo simulations of nanoscale focused neon ion beam sputtering

Title
Monte Carlo simulations of nanoscale focused neon ion beam sputtering
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 49, Pages 495303
Publisher
IOP Publishing
Online
2013-11-15
DOI
10.1088/0957-4484/24/49/495303

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