4.6 Article

Rice-straw-like structure of silicon nanowire arrays for a hydrogen gas sensor

Journal

NANOTECHNOLOGY
Volume 24, Issue 47, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/24/47/475502

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Funding

  1. National Science Council of Taiwan [100-2221-E-011-052-MY3]
  2. National Taiwan University of Science and Technology

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A rice-straw-like silicon nanowire (SiNW) array was developed for hydrogen gas sensing applications. The straight-aligned SiNW array sensor was first fabricated by the metal-assisted electroless etching (MAEE) technique. Rice-straw-like SiNW arrays were formed using a repeated MAEE technique. Hydrogen sensing characteristics were measured for gas concentrations from 20 to 1000 ppm at room temperature. The rice-straw-like SiNW-array-based hydrogen gas sensor performed with low noise and a high response (232.5%) for 1000 ppm hydrogen gas. It was found that the rice-straw-like SiNW-array hydrogen gas sensor had a much better response (approximately 2.5 times) than the straight-aligned SiNW-array sensor. The rice-straw-like SiNW-array structure effectively increased the surface area and the concentration of silicon oxide, which provided additional binding sites for gas molecules. Thus, the rice-straw-like SiNW-array-based hydrogen gas sensor possessed good sensing properties and has the potential for mass production of sensing devices.

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