Silicon nanowires with controlled sidewall profile and roughness fabricated by thin-film dewetting and metal-assisted chemical etching

Published 2013 View Full Article

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Title
Silicon nanowires with controlled sidewall profile and roughness fabricated by thin-film dewetting and metal-assisted chemical etching
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 22, Pages 225305
Publisher
IOP Publishing
Online
2013-05-03
DOI
10.1088/0957-4484/24/22/225305

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