Fabrication of a sub-10 nm silicon nanowire based ethanol sensor using block copolymer lithography

Published 2013 View Full Article

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Title
Fabrication of a sub-10 nm silicon nanowire based ethanol sensor using block copolymer lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 6, Pages 065503
Publisher
IOP Publishing
Online
2013-01-23
DOI
10.1088/0957-4484/24/6/065503

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