Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography

Published 2013 View Full Article

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Title
Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 27, Pages 275705
Publisher
IOP Publishing
Online
2013-06-14
DOI
10.1088/0957-4484/24/27/275705

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