The atomic layer deposition array defined by etch-back technique: a new method to fabricate TiO2nanopillars, nanotubes and nanochannel arrays

Title
The atomic layer deposition array defined by etch-back technique: a new method to fabricate TiO2nanopillars, nanotubes and nanochannel arrays
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 23, Issue 48, Pages 485306
Publisher
IOP Publishing
Online
2012-11-06
DOI
10.1088/0957-4484/23/48/485306

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