Continuous phase-shift lithography with a roll-type mask and application to transparent conductor fabrication

Published 2012 View Full Article

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Title
Continuous phase-shift lithography with a roll-type mask and application to transparent conductor fabrication
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 34, Pages 344008
Publisher
IOP Publishing
Online
2012-08-10
DOI
10.1088/0957-4484/23/34/344008

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