Electron beam induced deposition of silicon nanostructures from a liquid phase precursor

Published 2012 View Full Article

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Title
Electron beam induced deposition of silicon nanostructures from a liquid phase precursor
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 23, Issue 38, Pages 385302
Publisher
IOP Publishing
Online
2012-09-05
DOI
10.1088/0957-4484/23/38/385302

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