Effect of surface tension and coefficient of thermal expansion in 30 nm scale nanoimprinting with two flexible polymer molds

Published 2012 View Full Article

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Title
Effect of surface tension and coefficient of thermal expansion in 30 nm scale nanoimprinting with two flexible polymer molds
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 23, Pages 235303
Publisher
IOP Publishing
Online
2012-05-18
DOI
10.1088/0957-4484/23/23/235303

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