Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Published 2012 View Full Article

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Title
Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 24, Issue 2, Pages 025601
Publisher
IOP Publishing
Online
2012-12-10
DOI
10.1088/0957-4484/24/2/025601

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