Sub-100 nm Si nanowire and nano-sheet array formation by MacEtch using a non-lithographic InAs nanowire mask

Title
Sub-100 nm Si nanowire and nano-sheet array formation by MacEtch using a non-lithographic InAs nanowire mask
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 30, Pages 305305
Publisher
IOP Publishing
Online
2012-07-11
DOI
10.1088/0957-4484/23/30/305305

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