Patterning-induced strain relief in single lithographic SiGe nanostructures studied by nanobeam x-ray diffraction

Title
Patterning-induced strain relief in single lithographic SiGe nanostructures studied by nanobeam x-ray diffraction
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 15, Pages 155702
Publisher
IOP Publishing
Online
2012-03-28
DOI
10.1088/0957-4484/23/15/155702

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