A novel fabrication method of silicon nano-needles using MEMS TMAH etching techniques

Published 2011 View Full Article

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Title
A novel fabrication method of silicon nano-needles using MEMS TMAH etching techniques
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 12, Pages 125301
Publisher
IOP Publishing
Online
2011-02-15
DOI
10.1088/0957-4484/22/12/125301

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