Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers

Published 2011 View Full Article

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Title
Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 24, Pages 245501
Publisher
IOP Publishing
Online
2011-04-21
DOI
10.1088/0957-4484/22/24/245501

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