A single-step electron beam lithography of buried nanostructures using cathodoluminescence imaging and low temperature

Published 2010 View Full Article

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Title
A single-step electron beam lithography of buried nanostructures using cathodoluminescence imaging and low temperature
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 37, Pages 375303
Publisher
IOP Publishing
Online
2010-08-21
DOI
10.1088/0957-4484/21/37/375303

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