The fabrication of large-area, free-standing GaN by a novel nanoetching process

Published 2010 View Full Article

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Title
The fabrication of large-area, free-standing GaN by a novel nanoetching process
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 4, Pages 045603
Publisher
IOP Publishing
Online
2010-12-21
DOI
10.1088/0957-4484/22/4/045603

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