Electron-beam-induced deposition of gold from aqueous solutions

Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl4), sodium tetrachloroaurate (NaAuCl4), and the disulfitoaurate complex ([Au(SO3)(2)](3-)). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.