4.6 Article

Comprehensive investigation of sequential plasma activated Si/Si bonded interfaces for nano-integration on the wafer scale

Journal

NANOTECHNOLOGY
Volume 21, Issue 13, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/21/13/134011

Keywords

-

Funding

  1. Natural Science and Engineering Research Council of Canada [327947]
  2. Canada Foundation for Innovation (CFI) [12128]

Ask authors/readers for more resources

The sequentially plasma activated bonding of silicon wafers has been investigated to facilitate the development of chemical free, room temperature and spontaneous bonding required for nanostructure integration on the wafer scale. The contact angle of the surface and the electrical and nanostructural behavior of the interface have been studied. The contact angle measurements show that the sequentially plasma ( reactive ion etching plasma followed by microwave radicals) treated surfaces offer highly reactive and hydrophilic surfaces. These highly reactive surfaces allow spontaneous integration at the nanometer scale without any chemicals, external pressure or heating. Electrical characteristics show that the current transportation across the nanobonded interface is dependent on the plasma parameters. High resolution transmission electron microscopy results confirm nanometer scale bonding which is needed for the integration of nanostructures. The findings can be applied in spontaneous integration of nanostructures such as nanowires/nanotubes/quantum dots on the wafer scale.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Materials Science, Ceramics

Low-temperature rough-surface wafer bonding with aluminum nitride ceramics implemented by capillary and oxidation actions

Shao-Ming Nien, Jian-Long Ruan, Yang-Kuao Kuo, Benjamin Tien-Hsi Lee

Summary: Aluminum nitride is a ceramic material that is widely used in microelectronics and energy fields due to its excellent dielectric and thermal properties. This study demonstrates a procedure for achieving rough-surface wafer bonding of aluminum nitride by activating the surfaces, promoting reactions between aluminum nitride and bonding species, and joining the surfaces through low-temperature annealing.

CERAMICS INTERNATIONAL (2022)

Article Biodiversity Conservation

A machine learning framework to classify Southeast Asian echolocating bats

Natalie Yoh, Tigga Kingston, Ellen McArthur, Oliver E. Aylen, Joe Chun-Chia Huang, Emy Ritta Jinggong, Faisal Ali Anwarali Khan, Benjamin P. Y. H. Lee, Simon L. Mitchell, Jake E. Bicknell, Matthew J. Struebig

Summary: This study presents a semi-automated framework for classifying bat calls in Southeast Asia, which can rapidly and accurately process large volumes of data, providing an alternative method for non-invasive monitoring of bats when species-specific classifiers are not yet feasible.

ECOLOGICAL INDICATORS (2022)

Article Materials Science, Multidisciplinary

In-situ STEM study on thermally induced phase transformation of magnetic (Nd0.75Ce0.25)2Fe14B ribbons

Xiangyu Zhu, Byung Oh Jung, Qingxiao Wang, Yaoqiao Hu, Myungshin Choi, Sunyong Song, Seok Namkung, Namseok Kang, Hui-Youn Shin, Minho Joo, M. J. Kim

Summary: This study investigated the phase transformation and microstructure evolution of magnetic Nd-Ce-Fe-B nanocrystalline melt-spun ribbon. The results revealed the accumulation of rare earth elements at grain boundary areas and the formation of an amorphous layer between grains at high temperatures. Additionally, the primary phase decomposed and transformed into other phases at elevated temperatures.

MATERIALS & DESIGN (2022)

Article Materials Science, Multidisciplinary

Solving oxygen embrittlement of refractory high-entropy alloy via grain boundary engineering

Zhengqi Wang, Honghui Wu, Yuan Wu, Hailong Huang, Xiangyu Zhu, Yingjie Zhang, Huihui Zhu, Xiaoyuan Yuan, Qiang Chen, Shudao Wang, Xiongjun Liu, Hui Wang, Suihe Jiang, Moon J. Kim, Zhaoping Lu

Summary: In this study, large plasticity and high strength were achieved in NbMoTaW RHEAs through grain boundary engineering and the addition of metalloid B or C. The room-temperature brittleness of as-cast NbMoTaW RHEA was found to be caused by grain boundary segregation of oxygen, which was alleviated by the added metalloids, leading to a change in fracture morphology.

MATERIALS TODAY (2022)

Article Nanoscience & Nanotechnology

Quasi-CW Lasing from Directly Patterned and Encapsulated Perovskite Cavity at 260 K

Jiyoung Moon, Masoud Alahbakhshi, Abouzar Gharajeh, Quanwei Li, Ross Haroldson, Sunah Kwon, Roberta Hawkins, Moon J. Kim, Walter Hu, Xiang Zhang, Anvar Zakhidov, Qing Gu

Summary: This study demonstrates the generation of quasi-continuous wave (quasi-CW) lasing from directly patterned perovskite cavities up to high temperatures using nanoimprint lithography and a thin layer of polycarbonate for encapsulation. The polycarbonate layer effectively protects the devices from surface defects and environmental hazards. The results suggest that achieving continuous wave (CW) lasing at room temperature from directly patterned perovskite cavities is within reach.

ACS PHOTONICS (2022)

Article Chemistry, Multidisciplinary

Stable and Bright Electroluminescent Devices utilizing Emissive 0D Perovskite Nanocrystals Incorporated in a 3D CsPbBr3 Matrix

Aditya Mishra, Riya Bose, Yangzi Zheng, Weijie Xu, Reema McMullen, Abhas B. Mehta, Moon J. Kim, Julia W. P. Hsu, Anton Malko, Jason D. Slinker

Summary: A novel method of incorporating highly luminescent 0D Cs4PbBr6 nanocrystals into a 3D CsPbBr3 film has been designed, leading to a significant increase in external quantum efficiency, luminance, improved morphology, reduced leakage current, reduced hysteresis, and enhanced operational lifetime.

ADVANCED MATERIALS (2022)

Article Veterinary Sciences

Establishment of a Captive Cave Nectar Bat (Eonycteris spelaea) Breeding Colony in Singapore

Randy Foo, Ying Ying Hey, Justin Han Jia Ng, Yok Teng Chionh, Wan Ni Chia, Pui San Kong, Benjamin P. Y-H Lee, Adrian Eng Zheng Kang, Sophie Alison Borthwick, Dolyce Hong Wen Low, Ian Hewitt Mendenhall, Edgar Macabe Pena, Rommel E. Yroy, Beng Sern Ng, Lin-Fa Wang

Summary: Bats are natural reservoirs of highly pathogenic viruses and have unique features that make them ideal for studying infection, cancer, and longevity. However, the lack of breeding bat colonies has been a limitation. To address this, Singapore established a captive bat colony from wild-caught bats, providing a valuable resource for research.

JOURNAL OF THE AMERICAN ASSOCIATION FOR LABORATORY ANIMAL SCIENCE (2022)

Article Materials Science, Multidisciplinary

Unveiling interfacial structure and improving thermal conductivity of Cu/diamond composites reinforced with Zr-coated diamond particles

Luhua Wang, Guangzhu Bai, Ning Li, Liyin Gao, Jianwei Li, Ke Xu, Xitao Wang, Hailong Zhang, Jinguo Wang, Moon J. Kim

Summary: Cu/Zr-diamond composites were prepared by coating diamond surfaces with Zr coatings of different thicknesses. The study found that the formed ZrC layer can enhance the interface bonding, but excessively thick ZrC layers result in a decrease in thermal conductivity of the composites.

VACUUM (2022)

Review Chemistry, Physical

Materials Perspectives of Integrated Plasmonic Biosensors

Ayman Negm, Matiar M. R. Howlader, Ilya Belyakov, Mohamed Bakr, Shirook Ali, Mehrdad Irannejad, Mustafa Yavuz

Summary: This review explores the potential of plasmonic materials in the field of biosensors. It discusses the physical aspects of plasmonic interactions, highlights mainstream and future plasmonic materials, and describes the substrates used in building plasmonic biosensors. The study identifies the role of 2D materials in enhancing sensor sensitivity and proposes titanium nitride as a promising alternative to gold. It also emphasizes the emerging role of polymer substrates in the design of wearable and point-of-care devices.

MATERIALS (2022)

Review Chemistry, Analytical

Analyzing chronic disease biomarkers using electrochemical sensors and artificial neural networks

K. Sinha, Z. Uddin, H. I. Kawsar, S. Islam, M. J. Deen, M. M. R. Howlader

Summary: This article provides a concise review of chronic disease biomarkers acquired by electrochemical sensors and discusses the potential of artificial neural networks in disease monitoring and management. It also describes risk factors, causes, pathophysiological processes, and severity of chronic diseases, as well as how sensed biomarkers and clinical symptoms can be used as features for machine learning algorithms. Finally, it explores how patterns in biosensor data uncovered by artificial neural networks can be used to predict and diagnose chronic diseases. This review will contribute to the development of artificial neural network-based analytical tools for chronic diseases and other healthcare applications in the future.

TRAC-TRENDS IN ANALYTICAL CHEMISTRY (2023)

Article Materials Science, Multidisciplinary

Biomarker detection using GST-based permittivity-asymmetric metasurface

Ayman Negm, Matiar M. R. Howlader, Mohamed Bakr, Shirook Ali

Summary: Non-invasive detection of biomarkers is important for early screening of diseases. This paper presents a numerical study of a tunable metasurface for mid-infrared detection using Germanium Antimony Telluride. The design involves using dissimilar materials and optimizing parameters to achieve high-quality resonances for trace analyte sensing. A practical device layout for biomarker detection applications is also proposed.

MATERIALS & DESIGN (2023)

Article Biodiversity Conservation

Rewilding in Southeast Asia: Singapore as a case study

Therese Lamperty, Wen Xuan Chiok, Max D. Y. Khoo, Zachary Amir, Nick Baker, Marcus A. H. Chua, Yi Fei Chung, Yen Kheng Chua, Joshua J. -M. Koh, Benjamin P. Y. -H. Lee, Shawn K. Y. Lum, Calebe P. Mendes, Jonathan Ngiam, Anthony ODempsey, Kenny G. C. Png, Adia R. Sophie, Lorraine Tan, Robert Teo, Noel Thomas, Li Tianjiao, Bryan Lim Tze-Ming, Adrian H. B. Loo, David A. Wardle, Matthew Scott Luskin

Summary: Rewilding, or the re-establishment of extinct wildlife, is considered as a means to restore biodiversity and ecosystem processes, but there are limited real-world examples of this process, especially in Southeast Asia. Using camera trap data, occupancy models, and input from local experts, this study examines the natural recolonization of two native large herbivores in Singapore. Sambar deer have only colonized nearby forest fragments with low abundance, while wild pigs have rapidly expanded their range and abundance across Singapore. The divergent rewilding trajectories between these two species suggest different conservation outcomes and management requirements.

CONSERVATION SCIENCE AND PRACTICE (2023)

Article Ecology

Proximity to anthropogenic food sources determine roosting and nesting prevalence of feral pigeons (Columba livia) in a tropical city

Kai Ning Lim, Malcolm C. K. Soh, Duncan Y. W. Leong, Adrian H. B. Loo, Benjamin P. Y. -H. Lee, Kenneth B. H. Er

Summary: The feral pigeon is a globally commensal bird that can cause disamenities and spread diseases. The management of their population can be achieved by limiting food and reducing the availability of roosting and nesting sites. However, there is limited knowledge about their roosting and nesting preferences.

ECOLOGICAL SOLUTIONS AND EVIDENCE (2023)

Review Chemistry, Analytical

Advanced functional materials for electrochemical dopamine sensors

Grace Burns, Md Younus Ali, Matiar M. R. Howlader

Summary: This review discusses advances in the development and use of electrochemical dopamine sensors in the past five years and identifies areas for improvement in clinical applications. Current dopamine sensors need further improvement in performance for real sample detection.

TRAC-TRENDS IN ANALYTICAL CHEMISTRY (2023)

Article Chemistry, Analytical

High performance nonenzymatic electrochemical sensors via thermally grown Cu native oxides (CuNOx) towards sweat glucose monitoring

Maksud M. Alam, Matiar M. R. Howlader

Summary: A high-performance, low-cost nonenzymatic sensor for sweat glucose detection has been developed using thermally grown native oxide of copper. The sensor exhibits excellent sensitivity, linearity, stability, and selectivity, making it a promising alternative for real-time blood glucose monitoring.

ANALYST (2023)

No Data Available