The fabrication of a programmable via using phase-change material in CMOS-compatible technology

Published 2010 View Full Article

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Title
The fabrication of a programmable via using phase-change material in CMOS-compatible technology
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 21, Issue 13, Pages 134001
Publisher
IOP Publishing
Online
2010-03-09
DOI
10.1088/0957-4484/21/13/134001
References
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