Nanoimprint lithography using vertically aligned carbon nanostructures as stamps

Published 2009 View Full Article

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Title
Nanoimprint lithography using vertically aligned carbon nanostructures as stamps
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 37, Pages 375302
Publisher
IOP Publishing
Online
2009-08-27
DOI
10.1088/0957-4484/20/37/375302

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