The fabrication and application of patterned Si(001) substrates with ordered pits via nanosphere lithography

Title
The fabrication and application of patterned Si(001) substrates with ordered pits via nanosphere lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 9, Pages 095303
Publisher
IOP Publishing
Online
2009-02-07
DOI
10.1088/0957-4484/20/9/095303

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