The controlled fabrication of nanopores by focused electron-beam-induced etching

Published 2009 View Full Article

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Title
The controlled fabrication of nanopores by focused electron-beam-induced etching
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 24, Pages 245302
Publisher
IOP Publishing
Online
2009-05-27
DOI
10.1088/0957-4484/20/24/245302

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